Thermally-induced optical property changes of sputtered PdOx films

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4774-4777

  Arai, T ^a   Shima, T ^a   Nakano, T ^a   Tominaga, J ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Optical properties; Palladium oxide; Raman scattering; Sputtering

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; CRYSTALLIZATION; FLUORESCENCE; LIGHT TRANSMISSION; OPTICAL PROPERTIES; OXYGEN; PALLADIUM COMPOUNDS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SPUTTERING; THERMAL EFFECTS; THERMOGRAVIMETRIC ANALYSIS; X RAYS;

LIGHT TRANSMISSION MEASUREMENTS; OXYGEN GAS-FLOW RATIO; SPUTTERED PALLADIUM OXIDE; X-RAY FLUORESCENCE;

THIN FILMS;

EID: 33847109012     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.040     Document Type: Article

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