Identification and control of SiC polytypes in PVT method

Journal of Materials Science: Materials in Electronics

Volumn 21, Issue 4, 2010, Pages 326-330

  Lin, Shenghuang ^a   Chen, Zhiming ^a   Liu, Bo ^a   Li, Lianbi ^a   Feng, Xianfeng ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH SURFACES; PHYSICAL VAPOR TRANSPORT; POLYTYPES; RAMAN SCATTERING SPECTRA; RELATIVE POSITIONS; SIC POLYTYPES; TRANSMISSION ELECTRON MICROSCOPE;

ELECTRON MICROSCOPES; SILICON CARBIDE; SURFACE CHEMISTRY; TRANSMISSION ELECTRON MICROSCOPY;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77950369918     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-009-9914-3     Document Type: Article

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