SCOPUS 정보 검색 플랫폼

Journal of Materials Science: Materials in Electronics

Volumn 21, Issue 4, 2010, Pages 349-354

Orthogonal analysis for perovskite structure microwave dielectric ceramic thin films fabricated by the RF magnetron-sputtering method

(4) Chuanwen, Cui a,b Feng, Shi a,b Yuguo, Li a Shuyun, Wang a

a SHANDONG NORMAL UNIVERSITY (China)

b SHANDONG UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPREHENSIVE EVALUATION; DIELECTRIC THIN FILMS; FILM QUALITY; MICROWAVE DIELECTRIC CERAMICS; OPTIMAL PROCESS; ORTHOGONAL ANALYSIS; PEROVSKITE STRUCTURES; PROCESS PARAMETERS; RADIO FREQUENCY MAGNETRON SPUTTERING; RF MAGNETRONS; RF-MAGNETRON SPUTTERING; SPUTTERING METHODS; SPUTTERING POWER; SPUTTERING PRESSURES; SUBSTRATE TEMPERATURE; WORKING GAS;

CERAMIC MATERIALS; MAGNETRON SPUTTERING; MICROWAVES; OXIDE MINERALS; PEROVSKITE; PRESSURE EFFECTS; SILICON COMPOUNDS; SUBSTRATES; THIN FILMS;

DIELECTRIC MATERIALS;

EID: 77950369762 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-009-9919-y Document Type: Article

Times cited : (79)

References (9)

1
- 77950368213
- TianJin University Ph.D. Dissertation
- 3 Microwave dielectric Ceramics, TianJin University Ph.D. Dissertation, 2003
- (2003) 3 Microwave Dielectric Ceramics
- Feng, S.¹

2
- 2942539345
- 3
- 3 TamKang J. Sci. Eng. 5 2 113 116
- (2002) TamKang J. Sci. Eng. , vol.5 , Issue.2 , pp. 113-116
- Hong-Wen, W.¹

3
- 33646748485
- Key problems in the preparation of(Ba,Sr)TiO3 thin films by RF magnetron reactive sputter deposition
- M Jun F Jie Y Chun-sheng D Gui-fu 2006 Key problems in the preparation of(Ba,Sr)TiO3 thin films by RF magnetron reactive sputter deposition Piezoelectrics Acoustooptrics 28 2 205 208
- (2006) Piezoelectrics Acoustooptrics , vol.28 , Issue.2 , pp. 205-208
- Jun, M.¹ Jie, F.² Chun-Sheng, Y.³ Gui-Fu, D.⁴

4
- 74149087777
- 3 thin film
- 3 thin film Adv. Ceram. 27 3 16 19
- (2006) Adv. Ceram. , vol.27 , Issue.3 , pp. 16-19
- Lehai, Y.U.¹ Xinghua, F.U.²

5
- 33751067779
- Structure-properties correlations for barium titanate thin films obtained by rf-sputtering
- 10.1016/j.jeurceramsoc.2006.05.043 1:CAS:528:DC%2BD28Xht1WntrbP
- A Ianculescu B Despax V Bley T Lebey, et al. 2007 Structure-properties correlations for barium titanate thin films obtained by rf-sputtering J. Eur. Ceramic Soc. 27 10 1129 1135 10.1016/j.jeurceramsoc.2006.05.043 1:CAS:528:DC%2BD28Xht1WntrbP
- (2007) J. Eur. Ceramic Soc. , vol.27 , Issue.10 , pp. 1129-1135
- Ianculescu, A.¹ Despax, B.² Bley, V.³ Lebey, T.⁴

6
- 33747333396
- 3 thin films prepared by radio frequency magnetron sputtering
- DOI 10.1016/j.jeurceramsoc.2005.09.109, PII S0955221905008976
- 3 thin films prepared by radio frequency magnetron sputtering J. Eur. Ceramic Soc. 26 9 3211 3219 10.1016/j.jeurceramsoc.2005.09.109 1:CAS:528:DC%2BD28Xot1GmtLw%3D (Pubitemid 44240212)
- (2006) Journal of the European Ceramic Society , vol.26 , Issue.15 , pp. 3211-3219
- Huang, H.-H.¹ Wang, M.-C.² Chen, C.-Y.³ Wu, N.-C.⁴ Lin, H.-J.⁵

7
- 77950370470
- Science Press, Beijing
- Z. Guo-quan, Applied Probability and Statistics, (Science Press, Beijing, 2003)
- (2003) Applied Probability and Statistics
- Guo-Quan, Z.¹

8
- 77950370625
- Higher education publishing house, Beijing
- Z. De-pei, L. Yun-ling, Applied Probability and Statistics, (Higher education publishing house, Beijing, 2000)
- (2000) Applied Probability and Statistics
- De-Pei, Z.¹ Yun-Ling, L.²

9
- 77950368717
- Tsinghua Publishing House, Beijing
- D. Bo, Statistical Processing Method of Analytic Data, (Tsinghua Publishing House, Beijing, 1995)
- (1995) Statistical Processing Method of Analytic Data
- Bo, D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.