An accurate direct extraction technique for the MBVD resonator model

Conference Proceedings- European Microwave Conference

Volumn 3, Issue , 2004, Pages 1241-1244

  Bjurström, Johan ^a   Vestling, Lars ^a   Olsson, Jörgen ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; DATA REDUCTION; ELECTRODES; ERROR ANALYSIS; FREQUENCIES; MATHEMATICAL MODELS; THIN FILMS;

ADMITTANCE; DIELECTRIC LOSS; FILM BULK ACOUSTIC RESONATORS (FBAR); RESONANCE FREQUENCY;

RESONATORS;

EID: 18844426531     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. T. R. Meeker, "Publication and Proposed Revision of ANSI/IEEE Standard 176-1987, ANSI/IEEE Standard on Piezoelectricity," IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, vol. 43, no. 5, p. 717, 1996.
2. J. D. Larson III, P. Bradley, S. Wartenberg, and R. Ruby, "Modified Butterworth-Van Dyke Circuit for FBAR Resonators and Automated Measurement System," in Proc. IEEE Ultrasonics Symp., 2000, pp. 863-868.
3. L. Vestling and J. Ankarcrona, "A General Small-Signal Series Impedance Extraction Technique," IEEE Microwave and Wireless Components Letters, vol. 12, no. 7, pp. 249-251, July 2002.