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Volumn , Issue , 2009, Pages
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Analytical investigation of the variations of nano-film densities with thickness
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Author keywords
Density; Elastic parameters; Nanofilms; Thickness
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Indexed keywords
DENSITY (SPECIFIC GRAVITY);
II-VI SEMICONDUCTORS;
III-V SEMICONDUCTORS;
MAGNESIA;
SILICA;
SILICON CARBIDE;
ZINC OXIDE;
ANALYTICAL INVESTIGATIONS;
BULK DENSITY;
ELASTIC PARAMETERS;
LAYER THICKNESS;
MASS DENSITIES;
NANO FILMS;
SATURATION REGION;
THICKNESS;
ALUMINUM NITRIDE;
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EID: 77949956514
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICTONMW.2009.5385549 Document Type: Conference Paper |
Times cited : (2)
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References (12)
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