CMOS-SOI-MEMS transistor (TeraMOS) for Terahertz Imaging

2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

Volumn , Issue , 2009, Pages

  Corcos, D ^a   Goren, D ^a   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

CMOS; MOS transistors; Silicon on Insulator (SOI); Temperature Coefficient of Current (TCC); Terahertz sensors

Indexed keywords

ADVANCED PROCESS; ELECTRICAL CHARACTERIZATION; FIGURE OF MERIT; GATE VOLTAGES; HIGHLY SENSITIVE; LEADING TECHNOLOGY; MICRO ELECTRO MECHANICAL SYSTEM; MOS TRANSISTORS; POST PROCESSING; RF-CMOS; SILICON ON INSULATOR; SILICON-ON-INSULATORS; SOI-MEMS; TEMPERATURE COEFFICIENT OF CURRENT; TERAHERTZ IMAGING; TERAHERTZ PHOTONICS; TERAHERTZ SENSORS;

DRAIN CURRENT; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MICROWAVE ANTENNAS; MICROWAVES; RADIO WAVES; SEMICONDUCTING SILICON; TRANSISTOR TRANSISTOR LOGIC CIRCUITS; TRANSISTORS;

CMOS INTEGRATED CIRCUITS;

EID: 77949868047     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMCAS.2009.5386033     Document Type: Conference Paper

References (10)

1. Y. Nemirovsky, "CMOS-SOI-MEMS Focal Plane Array for Passive and Active Terahertz Imaging", Technion patent application (provisional patent application, filed on December 31, 2008).
2. D. Goren and Y. Nemirovsky, "TeraMOS: SOI CMOS MEMS Focal Plane Matrix Chip for Passive TeraHertz Imaging", IWPC MMwave/THz Security Systems Conference, Herndon Virginia, (www.iwpc.org) April 19-22 2009.
3. E. Socher, O. Degani and Y. Nemirovsky, "TMOS - Infrared uncooled sensor and focal plane array", US Patent 7,489, 024 B2, 2009.
4. E. Socher, S. M. Beer and Y. Nemirovsky, "Temperature Sensitivity of SOI-CMOS Transistors for Use in Uncooled Thermal Sensing", IEEE Trans. Electron Devices, Vol. 52, no. 12, pp. 2784-2790, Dec. 2005.
5. L. Gitelman, S. Stolyarova, S. Bar-Lev, Z. Gutman, Y. Ochana, and Y. Nemirovsky, "CMOS-SOI-MEMS transistor for uncooled IR Imaging", IEEE Trans. Electron Devices, Vol.56(9), pp.1935-1042, 2009.
6. L. Gitelman, Z. Gutman, S. Bar-Lev, S. Stolyarova and Y. Nemirovsky, "CMOS-SOI-MEMS Transistor (TMOS) for Infrared Imaging", IEEE/LEOS International conference on Optical MEMS & Nanophotonics, Freiburg, Germany, August 2008.
7. L. Gitelman, Z. Gutman, S. Bar-Lev, S. Stolyarova and Y. Nemirovsky, "TMOS Novel Uncooled Sensors - Theory and Practice", IEEE COMCAS 2008, The International IEEE Conference on Microwaves, Communications, Antennas and Electronic Systems", Tel Aviv, Israel, May 13-14, 2008.
8. IBM CSOI7RF MPW by MOSIS (http://www.mosis.com).
9. Y. Taur and T. H.Ning, "Fundamentals of Modern VLSI Devices", Cambridge University Press, 1998.
10. Y. Nemirovsky, I. Brouk and C. G. Jakobson, "1/f Noise in CMOS Transistors for Analog Applications", IEEE Trans. on Electron Devices, Vol. 48 (5), pp. 921-7 (2001).