Diffractive optical elements with porous silicon layers

Applied Optics

Volumn 49, Issue 8, 2010, Pages 1341-1349

  Golub, Michael A ^a   Hutter, Tanya ^a   Ruschin, Shlomo ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); DIFFRACTIVE OPTICAL ELEMENTS; SILICON;

ANALYTES; P-SI LAYERS; POROUS SILICON LAYERS; SPECTRAL CHANGE; SPECTRAL SELECTIVITY; SURFACE RELIEFS;

POROUS SILICON;

EID: 77949789017     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.001341     Document Type: Article

References (18)

1. D. Faklis and G. M. Morris, "Spectral properties of multiorder diffractive lenses, " Appl. Opt. 34, 2462-2468 (1995).
2. U. Schulz, "Wideband antireflection coatings by combining interference multilayers with structured top layers, " Opt. Express 17, 8704-8708 (2009).
3. I. Reaa, M. Iodicea, G. Coppolaa, I. Rendinaa, A. Marinob, and L. De Stefano, "A porous silicon-based Bragg grating waveguide sensor for chemical monitoring, " Sens. Actuators B 139,39-43 (2009).
4. N. Nagy, J. Volk, A. Hámori, and I. Bársony, "Submicrometer period silicon diffraction gratings by porous etching, " Phys. Status Solidi A 202, 1639-1643 (2005).
5. L. De Stefano, I. Rendina, L. Moretti, S. Tundo, and A. M. Rossi, "Smart optical sensors for chemical substances based on porous silicon technology, " Appl. Opt. 43, 167-172 (2004).
6. T. Jalkanen, V. Torres-Costa, J. Salonen, M. Björkqvist, E. Mäkilä, J. M. Martínez-Duart, and V.-P. Lehto, "Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors, " Opt. Express 17, 5446-5456 (2009).
7. M. G. Bergers, C. Dieker, M. Thonissen, L. Vescan, H. Luth, H. Muender, W. Theiss, M. Wernke, and P. Grosse, "Porosity superlattices: a new class of Si heterostructures, " J. Phys. D 27, 1333-1336 (1994).
8. P. A. Snow, E. K. Squire, P. J. St. Russel, and L. T. Canham, "Vapor sensing using the optical properties of porous silicon Bragg mirrors, " J. Appl. Phys. 86, 1781-1784, (1999).
9. A. Alexeev-Popov, S. Gevelyuk, Ya. Roizin, and D. Savin, "Diffraction gratings on porous silicon, " Solid State Commun. 97, 591-593 (1996).
10. F. Cunin, T. A. Schmedake, J. R. Link, Y. Y. Li, J. Koh, S. N. Bhatia, and M. J. Sailor, "Biomolecular screening with encoded porous-silicon photonic crystals, " Nat. Mater. 1,39-41 (2002).
11. D. Chambers, G. Nordin, and S. Kim, "Fabrication and analysis of a three-layer stratified volume diffractive optical element high-efficiency grating, " Opt. Express 11,27-38 (2003).
12. M. A. Golub, "Generalized conversion from the phase function to the blazed surface-relief profile of diffractive optical elements, " J. Opt. Soc. Am. A 16, 1194-1201 (1999).
13. Properties of Silicon, Vol. 4 of European Mathematical Information Service (EMIS) Datareview Series (INSPEC/IEE, 1988).
14. C. F. Bohren and D. R. Huffman, The Absorption and Scattering of Light By Small Particles (Wiley, 1983), p. 217.
15. DiffractMOD software code, Rsoft Design Group Inc., www.rsoftdesign.com.
16. R. Herino, G. Bomchil, K. Barla, C. Bertrand, and J. L. Ginoux, "Porosity and pore size distributions of porous silicon layers, " J. Electrochem. Soc. 134, 1994-2000 (1987).
17. S. J. Kim, V. P. Chodavarapu, A. N. Cartwright, M. T. Swihart, and T. J. Bunning, "Enhanced oxygen detection using porous polymeric gratings with integrated recognition elements, " Sens. Actuators B 130, 758-764 (2008).
18. C. Mazzoleni and L. Pavesi, "Application to optical components of dielectric porous silicon multilayers, " Appl. Phys. Lett. 67, 2983 (1995).