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Volumn 13, Issue 5, 2010, Pages

Physicochemical and electrical properties of LaLuO3/Ge(100) structures submitted to postdeposition annealings

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING PARAMETERS; BENEFICIAL EFFECTS; DIELECTRIC LAYER; ELECTRICAL CHARACTERIZATION; ELECTRICAL PROPERTY; GE(100); INTERFACE CHARACTERISTIC; OXYGEN ANNEALING; PHYSICOCHEMICAL PROPERTY; POST-DEPOSITION; POST-OXIDATION; SUBSTRATE OXIDATION;

EID: 77949678824     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3322517     Document Type: Article
Times cited : (13)

References (17)
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    • M. Heyns and W. Tsai, MRS Bull. 0883-7694, 34, 485 (2009).
    • (2009) MRS Bull. , vol.34 , pp. 485
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  • 4
    • 37249061772 scopus 로고    scopus 로고
    • High-k/Ge MOSFETs for future nanoelectronics
    • DOI 10.1016/S1369-7021(07)70350-4, PII S1369702107703504
    • Y. Kamata, Mater. Today 1369-7021, 11, 30 (2008). 10.1016/S1369-7021(07) 70350-4 (Pubitemid 350266412)
    • (2008) Materials Today , vol.11 , Issue.1-2 , pp. 30-38
    • Kamata, Y.1
  • 5
    • 33745728942 scopus 로고    scopus 로고
    • Nanoscale germanium MOS dielectrics - Part I: Germanium oxynitrides
    • DOI 10.1109/TED.2006.875808
    • C. O. Chui, F. Ito, and K. C. Saraswat, IEEE Trans. Electron Devices 0018-9383, 53, 1501 (2006). 10.1109/TED.2006.875808 (Pubitemid 43997209)
    • (2006) IEEE Transactions on Electron Devices , vol.53 , Issue.7 , pp. 1501-1508
    • Chui, C.O.1    Ito, F.2    Saraswat, K.C.3
  • 17
    • 0029273669 scopus 로고
    • 0039-6028, 10.1016/0039-6028(94)00746-2
    • K. Prabhakaran and T. Ogino, Surf. Sci. 0039-6028, 325, 263 (1995). 10.1016/0039-6028(94)00746-2
    • (1995) Surf. Sci. , vol.325 , pp. 263
    • Prabhakaran, K.1    Ogino, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.