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Volumn 121, Issue 1-2, 2010, Pages 249-253
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Investigation of the refractive index and dispersion parameters of tungsten oxynitride thin films
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Author keywords
Dispersion parameters; Refractive index; WOxNy
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Indexed keywords
CAUCHY DISPERSION;
COORDINATION NUMBER;
DISPERSION PARAMETERS;
DUAL MAGNETRON SPUTTERING;
ENVELOPE METHOD;
GLASS SUBSTRATES;
NITROGEN CONTENT;
OPTICAL TRANSMITTANCE;
OXYNITRIDES;
REFLECTANCE MEASUREMENTS;
SPECTRAL RANGE;
AMORPHOUS FILMS;
ARGON;
DISPERSIONS;
LIGHT REFRACTION;
NITRIDES;
ORGANIC POLYMERS;
OXYGEN;
REFRACTIVE INDEX;
REFRACTOMETERS;
SUBSTRATES;
THIN FILMS;
TUNGSTEN;
X RAY DIFFRACTION;
DISPERSION (WAVES);
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EID: 77949656871
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matchemphys.2010.01.028 Document Type: Article |
Times cited : (18)
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References (26)
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