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Volumn 121, Issue 1-2, 2010, Pages 249-253

Investigation of the refractive index and dispersion parameters of tungsten oxynitride thin films

Author keywords

Dispersion parameters; Refractive index; WOxNy

Indexed keywords

CAUCHY DISPERSION; COORDINATION NUMBER; DISPERSION PARAMETERS; DUAL MAGNETRON SPUTTERING; ENVELOPE METHOD; GLASS SUBSTRATES; NITROGEN CONTENT; OPTICAL TRANSMITTANCE; OXYNITRIDES; REFLECTANCE MEASUREMENTS; SPECTRAL RANGE;

EID: 77949656871     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2010.01.028     Document Type: Article
Times cited : (18)

References (26)
  • 12
    • 77949654604 scopus 로고    scopus 로고
    • US Patent 7002202
    • S. Yang, A.K. Vishnu, US Patent 7002202 (2006).
    • (2006)
    • Yang, S.1    Vishnu, A.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.