Structure of rhenium coatings obtained by CVD

Journal of Structural Chemistry

Volumn 50, Issue 6, 2009, Pages 1126-1133

  Gelfond, N V ^a   Morozova, N B ^a   Filatov, E S ^a   Gromilov, S A ^a   Igumenov, I K ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

Chemical vapor deposition (CVD); Cyclopentadienyl rhenium tricarbonyl; Dirhenium decacarbonyl; Re coatings; Scanning electron microscopy; X ray diffraction

Indexed keywords

EID: 77949633485     PISSN: 00224766     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10947-009-0165-1     Document Type: Article

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