Improved anti-stiction coating of SU-8 molds

Sensors and Actuators, B: Chemical

Volumn 145, Issue 2, 2010, Pages 698-701

  Moresco, Jacob ^a   Clausen, Casper H ^a   Svendsen, Winnie ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Anti stiction; Embossing; FDTS; PMMA; SU 8

Indexed keywords

ACTIVATED SURFACES; ANTI-STICTION; ANTI-STICTION COATING; EPOXY GROUP; MOLD FABRICATION; OXYGEN PLASMAS; POLYDIMETHYLSILOXANE PDMS; SIMPLE METHOD; VAPOR PHASE DEPOSITION;

ACIDS; COATINGS; ESTERS; MICROCHANNELS; MOLDS; OXYGEN; PLASMA DEPOSITION; SELF ASSEMBLY; SILICONES; STICTION; SULFURIC ACID; VAPORS;

PHOTORESISTS;

EID: 77949297161     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.01.020     Document Type: Article

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