Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir and IrOx films deposited by RF sputtering

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Lee, Soo Hyun ^a   Jung, Jung Hwan ^a   Chae, Youn Mee ^a   Suh, Jun Kyo Francis ^a   Kang, Ji Yoon ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEMS; CONDUCTING MATERIALS; CUFF ELECTRODE; DELIVERY CAPACITY; DEPOSITED FILMS; GAS RATIO; IRIDIUM OXIDES; NEURAL INTERFACES; RF-MAGNETRON SPUTTERING; RF-SPUTTERING; SUBSTRATE MATERIAL; WORKING PRESSURES;

CONDUCTIVE FILMS; CYCLIC VOLTAMMETRY; ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRODES; IRIDIUM; IRIDIUM COMPOUNDS; MAGNETRON SPUTTERING; PLATINUM; POLYIMIDES;

ELECTROCHEMICAL PROPERTIES;

EID: 77749309845     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035015     Document Type: Article

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