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Volumn 204, Issue 15, 2010, Pages 2362-2367
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Deposition of diamond/β-SiC nanocomposite films onto a cutting tool material
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Author keywords
SiC; Cutting tools; Diamond; Interlayer; Nanocomposite; Nanodiamond
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Indexed keywords
CO-SUBSTRATE;
COMPOSITE THIN FILMS;
DEPOSITED FILMS;
ENERGY DISPERSIVE X-RAY;
FOURIER TRANSFORM INFRARED;
GAS FLOWS;
GLANCING ANGLE X-RAY DIFFRACTIONS;
GRADIENT FILM;
HARD METAL SUBSTRATE;
INTERLAYER;
MICRO-RAMAN SCATTERING;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS;
NANO DIAMOND;
NANOCOMPOSITE FILM;
NANOCRYSTALLINE DIAMONDS;
NANOCRYSTALLINES;
PHASE MIXTURE;
SEM;
SIC GRAINS;
SINGLE PROCESS;
SMOOTH SURFACE;
TETRAMETHYLSILANE;
CUTTING TOOLS;
DEPOSITION;
DIAMOND CUTTING TOOLS;
DIAMONDS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
FRACTURE TOUGHNESS;
FUNCTIONAL ELECTRIC STIMULATION;
GRAIN BOUNDARIES;
MACHINE TOOLS;
METAL WORKING TOOLS;
MICROSTRUCTURE;
MICROWAVES;
NANOCOMPOSITES;
PLASMA DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON CARBIDE;
SPECTROSCOPIC ANALYSIS;
THIN FILMS;
TUNGSTEN CARBIDE;
X RAY DIFFRACTION ANALYSIS;
COMPOSITE FILMS;
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EID: 77649188408
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2010.01.008 Document Type: Article |
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Times cited : (27)
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References (18)
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