3D analysis of semiconductor structures using STEM tomography

Design and Nature

Volumn 6, Issue , 2004, Pages 541-544

  Yates, T J V ^a   Weyland, M ^a   Laffont, L ^a   Zhi, D ^a   Dunin Borkowski, R E ^a   Midgley, P A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEFOCUS SERIES; ELECTRON PROBES; SPATIAL RESOLUTION; THREE-DIMENSIONAL STRUCTURE;

ELECTRONS; MACROMOLECULES; MORPHOLOGY; SCANNING; SEMICONDUCTOR QUANTUM DOTS; SENSITIVITY ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

SEMICONDUCTOR DEVICES;

EID: 7744232058     PISSN: 14780585     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (8)

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3. Midgley P A, Weyland M, Thomas J M and Johnson B F G 2001 Chem. Comm. 18, 907
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8. Zhi D, Wei M, Jones T S, Pashley D W, Zhang J, Joyce B A, Dunin-Burkowski R E and Midgley P A 2003 this Proceedings volume