Three-dimensional surface sculpting of freestanding metal-composite nanomembranes

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1487-1490

  Matović, Jovan ^a   Jakšić, Zoran ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Nanofabrication; Nanomembranes; Surface sculpting; Ultrathin freestanding structures

Indexed keywords

BASIC IDEA; BIOINTERFACES; BULK- MICROMACHINING; FREE-STANDING STRUCTURES; FUNCTIONALIZATIONS; MICRO-FABRICATION TECHNIQUES; NANOFABRICATION; NANOMEMBRANES; PLASMONICS; POTENTIAL APPLICATIONS; PYRAMIDAL SHAPE; SACRIFICIAL LAYER; SI BULK MICROMACHINING; SUB-WAVELENGTH; THREE-DIMENSIONAL SURFACE; TWO STAGE; ULTRA-THIN;

ASPECT RATIO; CHROMIUM; COMPOSITE MICROMECHANICS; DIAPHRAGMS; ENERGY HARVESTING; METAL RECOVERY; MICROMACHINING; MICROMETERS; NANOSTRUCTURES; PRESSURE DROP;

THREE DIMENSIONAL;

EID: 77049112267     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.074     Document Type: Article

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