Simple and reliable technology for manufacturing metal-composite nanomembranes with giant aspect ratio

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 906-909

  Matović, Jovan ^a   Jakšić, Zoran ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Giant aspect ratio; Nanofabrication; Nanomembranes; Ultrathin free standing structures

Indexed keywords

ATOMIC LAYERS; GIANT ASPECT RATIO; NANOFABRICATION; NANOMEMBRANES; NOVEL PROCESS; ULTRATHIN FREE-STANDING STRUCTURES;

NANOSTRUCTURES; PRESSURE DROP; STRUCTURAL METALS; STRUCTURE (COMPOSITION);

ASPECT RATIO;

EID: 67349238247     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.009     Document Type: Article

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