Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1451-1454

  Shingubara, S ^a   Maruo, S ^a   Yamashita, T ^a   Nakao, M ^b   Shimizu, T ^c  

^a KANSAI UNIVERSITY   (Japan)

^b National Institute of Informatics   (Japan)

^c Seicho Corp   (Japan)

Author keywords

AAO; Anodic oxidation; Nanohole; Nanoimprinting; Self organization; Storage media

Indexed keywords

NANO-IMPRINTING; NANOHOLES; SELF-ORGANIZATION; SELF-ORGANIZATIONS; STORAGE MEDIA;

MOLDS;

ANODIC OXIDATION;

EID: 76949106789     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.112     Document Type: Article

References (17)

1. Masuda H., and Fukuda K. Science 268 (1995) 146
2. Shingubara S., Okino O., Sayama Y., Sakaue H., and Takahagi T. Jpn. J. Appl. Phys. 36 (1997) 7791
3. Shingubara S. J. Nanopart. Res. 5 (2003) 17
4. Shimizu T., Xie T., Nishikawa J., Shingubara S., Senz S., and Gösele U. Adv. Mater. 19 (2007) 917
5. Shimizu T., Zhang Z., Shingubara S., Senz S., and Goesele U. Nano Lett. 9 4 (2009) 1523
6. Shimizu T., Nagayanagi N., Fujii Y., Yaegashi O., Wu G.R., Sakaue H., Takahagi T., Sakata S., Kusaka H., and Shingubara S. Trans. Magn. Soc. Jpn. 4 (2004) 231
7. Kawai S., and Ishiguro I. J. Electrochem. Soc. 122 (1975) 32
8. Nielsch K., Muller F., Li A.P., and Gosele U. Adv. Mater. 12 (2000) 582
9. Menon L., Bandyopadhyay S., Liu Y., Zeng H., and Sellmyer D.J. J. Nanosci. Nanotechnol. 1 (2001) 149
10. R.M. Metzger, M. Sun, G. Zangari, M. Shamsuzzoha, Mat. Res. Soc. Symp. Proc. 636 D.9.33.1 (2001).
11. Zhu H., Yang S.G., Ni G., Yu D.L., and Du Y.W. Scr. Mater. 44 (2001) 2291
12. Zheng M., Menon L., Zeng H., Liu Y., Bandyopadhyay S., Kirby R.D., and Sellmyer D.J. Phys. Rev. B 62 (2000) 12282
13. Chu S.Z., Inoue S., Wada K., Kanke Y., and Kurashima K. J. Electrochem. Soc. 152 (2005) C42
14. Masuda H., Yamada H., Saitoh M., Asoh H., Nakao M., and Tamamura T. Appl. Phys. Lett. 71 (1997) 2770
15. Shingubara S., Murakami Y., Morimoto K., Sakaue H., and Takahagi T. Surf. Sci. 532-535 (2003) 317
16. Choi J., Nielsch K., Reiche M., Wehrspohn R.B., and Goesele U. J. Vac. Sci. Technol. B 21 2 (2003) 763
17. Choi J., Wehrspohn R.B., and Gosele U. Electrochim. Acta 50 (2005) 2591