Diffusion of thiols during microcontact printing with rigid stamps

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 848-850

  Bergmair, Iris ^a,b   Mühlberger, Michael ^a   Lausecker, Elisabeth ^b   Hingerl, Kurt ^b   Schöftner, Rainer ^a  

^a PROFACTOR GMBH   (Austria)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Diffusion; Hard stamp; Microcontact printing; Thiols

Indexed keywords

CONTACT TIME; GOLD LINES; HARD STAMP; MICRO CONTACT PRINTING; NOVEL METHODS; POLYDIMETHYLSILOXANE STAMPS; REPRODUCIBILITIES; RIGID STAMP; SATURATION REGION; THIOL MOLECULES;

DIFFUSION; ETHANOL; PRINTING; SILICONES;

ELECTRON DEVICE MANUFACTURE;

EID: 76949106080     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.058     Document Type: Article

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