Free-standing silicon-nitride zoneplates for neutral-helium microscopy

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1011-1014

  Reisinger, Thomas ^a   Eder, Sabrina ^a   Greve, Martin M ^a   Smith, Henry I ^b   Holst, Bodil ^a  

^a UNIVERSITY OF BERGEN   (Norway)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Atom optics; Fresnel Zoneplate; Helium; Silicon nitride; Supersonic expansion beam

Indexed keywords

ATOM OPTICS; CHEMICAL INERTNESS; FABRICATION PROCESS; FIRST-ORDER; FOCUSING ELEMENTS; FRESNEL; FRESNEL LENS; FRESNEL ZONEPLATE; GROUND-STATE HELIUM; IMAGING PROBE; LOW ENERGIES; MICROSCOPY TECHNIQUE; NEUTRAL ATOMS; NEW PROCESS; SAMPLE SURFACE; SUPERSONIC-EXPANSION BEAM; TRANSMISSION CHARACTERISTICS;

DIFFRACTION; FABRICATION; HELIUM; LENSES; LIGHT; MONOLAYERS; NITRIDES; PROBES; RADIOACTIVITY;

ATOMS;

EID: 76949089841     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.107     Document Type: Article

References (7)

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