Tunable nano devices fabricated by controlled deposition of gold nanoparticles via focused ion beam

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1363-1366

  Shahmoon, Asaf ^a   Limon, Ofer ^a   Girshevitz, Olga ^a   Fleger, Yafit ^a   Demir, Hilmi Volkan ^b   Zalevsky, Zeev ^a  

^a BAR ILAN UNIVERSITY   (Israel)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

Nanofabrication; Nanoparticle patterning; Particle attachment; Particle deposition

Indexed keywords

CHARGED NANOPARTICLES; CONTROLLED DEPOSITION; DEPOSITION METHODS; EXPERIMENTAL CHARACTERIZATION; FABRICATION PROCEDURE; FOCUSED ION BEAM TECHNOLOGY; GOLD NANOPARTICLES; INSULATED MATERIALS; NANO DEVICE; NANOFABRICATION; NOVEL METHODS; PARTICLE DEPOSITIONS; SILICON-ON-INSULATORS; TUNABLE RADIATION; UPPER LAYER;

FOCUSED ION BEAMS; GALLIUM ALLOYS; GOLD COATINGS; IONS; NANOPARTICLES;

GOLD DEPOSITS;

EID: 76949084631     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.031     Document Type: Article

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