Imprinting a needle array on a polycarbonate substrate

International Journal of Precision Engineering and Manufacturing

Volumn 10, Issue 1, 2009, Pages 79-83

  Mekaru, Harutaka ^a   Takahashi, Masaharu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Electroforming; Imprint; LIGA process; Needle array; Polycarbonate; X ray lithography

Indexed keywords

EID: 76849103162     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0012-5     Document Type: Article

References (16)

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