Semiconductor manufacturing process monitoring based on adaptive substatistical PCA

IEEE Transactions on Semiconductor Manufacturing

Volumn 23, Issue 1, 2010, Pages 99-108

  Ge, Zhiqiang ^a   Song, Zhihuan ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Adaptive substatistical principal component analysis (PCA); Non Gaussian; Process monitoring; Support vector data description

Indexed keywords

GAUSSIANS; MULTI-MODEL; MULTI-WAY PCA; MULTIVARIATE STATISTICAL PROCESS CONTROL; MULTIWAY PRINCIPAL COMPONENT ANALYSIS; NON-GAUSSIAN; NON-GAUSSIAN PROCESS; PROCESS DATA; PROCESS OPERATION; PRODUCT QUALITY; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING PROCESS; SUPPORT VECTOR DATA DESCRIPTION; VALUE ESTIMATION;

DATA DESCRIPTION; GAUSSIAN NOISE (ELECTRONIC); INDUSTRIAL ENGINEERING; MULTIVARIANT ANALYSIS; NANOELECTRONICS; PROCESS MONITORING; PRODUCTION ENGINEERING; QUALITY CONTROL; STATISTICAL PROCESS CONTROL;

PRINCIPAL COMPONENT ANALYSIS;

EID: 76849101069     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2009.2039188     Document Type: Article

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