Development of an ultra precision machine tool for micromachining on large surfaces

International Journal of Precision Engineering and Manufacturing

Volumn 10, Issue 4, 2009, Pages 85-91

  Park, Chun Hong ^a   Song, Chang Kyu ^a   Hwang, Jooho ^a   Kim, Byung Sub ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Diagonal error; Large surface micro machining; Motion error; Structural analysis; Thermal displacement; Ultra precision machine tools

Indexed keywords

EID: 76849090829     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0075-3     Document Type: Article

References (11)

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