MOCVD of zirconium oxide from the zirconium guanidinate complex |ZrCp′{2-(iPrN)2CNMe2}2Cl]

ECS Transactions

Volumn 25, Issue 8 PART 1, 2009, Pages 561-565

  Blackman, C S ^a   Carmalt, C J ^a   Moniz, S J A ^a   Potts, S E ^a,b   Davies, H O ^c   Pugh, D C ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c SAFC Hitech   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS SUBSTRATES; CARBON CONTAMINATION; CARBONITRIDES; CHLORINE CONTAMINATION; COMPOSITIONAL ANALYSIS; DEPOSITED FILMS; DEPOSITION TEMPERATURES; GUANIDINATES; MIXED PHASE; MOCVD; MONOCLINIC PHASE; PREFERRED ORIENTATIONS; ZIRCONIUM OXIDE;

BOROSILICATE GLASS; CARBON FILMS; CARBON NITRIDE; CHLORINE; DEPOSITION; ZIRCONIA; ZIRCONIUM; ZIRCONIUM ALLOYS;

CHEMICAL VAPOR DEPOSITION;

EID: 76549119150     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3207640     Document Type: Conference Paper

References (21)

1. A. C. Newport, J. E. Bleau, C. J. Carmalt, I. P. Parkin and S. A. O'Neill, J. Mater. Chem., 14, 3333 (2004).
2. J. E. Bleau, C. J. Carmalt, S. A. O'Neill, I. P. Parkin, A. J. P. White and D. J. Williams, Polyhedron, 24, 463 (2005).
3. C. J.Carmalt, A. H. Cowley, R. D. Culp, R. A. Jones, Y.-M. Sun, B. Fitts, S. Whaley, H. W. Roesky, Inorg. Chem., 36, 3108 (1997);
4. C. J. Carmalt, A. H. Cowley, J. G. Ekerdt, R. A. Jones, P. S. Lall, B. G. McBurnett, S. R. Whaley, J. Chem. Soc., Dalton Trans., 553 (1998);
5. C. J. Carmalt, A. Newport, I. P. Parkin, P. Mountford, A. J. Sealey, S. R. Dubberley, J. Mater. Chem., 13, 84 (2003);
6. C. J. Carmalt, A. C. Newport, I. P. Parkin, A. J. P. White and D. J. Williams, J. Chem. Soc, Dalton Trans., 4055 (2002);
7. A. C. Newport, C. J. Carmalt, I. P. Parkin, S. A. O'Neill, J. Mater. Chem., 12, 1906 (2002).
8. A. C. Newport, C. J. Carmalt, I. P. Parkin, S. A. O'Neill, Eur. J. Inorg. Chem., 4286 (2004).
9. C. J. Carmalt, J. D. Mileham, A. J. P. White, D. J. Williams, J. W. Steed, Inorg. Chem., 40, 40, 6035 (2001).
10. P. Hassan, S. E. Potts, C. J. Carmalt, R. G. Palgrave, H. O. Davies, Polyhedron, 27, 1041(2008).
11. S. E. Potts, C. J. Carmalt, C. S. Blackman, T. Leese, H. O Davies, Dalton Trans., 5730 (2008).
12. C. J. Carmalt, A. C. Newport, S. A. O'Neill, I. P. Parkin, A. J. P. White, D. J. Williams, Inorg. Chem., 44, 615 (2005).
13. R. A. Fischer, A. Baunemann, D. Rische, M. Winter, Inorg. Chem., 45, 269 (2006);
14. R. A. Fischer, E. Gemel, H. Parala, D. Rische, M. Winter,. Chem. Mater., 18, 6075 (2006);
15. R. Fischer, D. Rische, H. Parala, A. Baunemann, T. Thiede, Surf. Coat. Technol., 201, 9125 (2007),
16. R. A. Fischer, A. Baunemann, C. Gemel, Y. Kim, A. Milanov, D. Rische, M. Winter, Dalton Trans., 3051 (2005).
17. P. J. Bailey, S. Pace, Coord. Chem. Rev., 214, 91 (2001).
18. S. E. Potts, C. J. Carmalt, C. S. Blackman, F. Abou-Chahine, D. Pugh, H. O. Davies, Organometallics, 28, 1838 (2009).
19. D. M. Hoffman, S. Javed, J.-S. Lehn, Chem. Vap. Deposition, 12, 280 (2006).
20. R. Fischer, A. Devi, R. Bhakta, A. Milanov, M. Hellwig, D. Barreca, E. Tondello, R. Thomas, P. Ehrhart, M. Winter, Dalton Trans., 1671 (2007).
21. R. Swanepoel, J. Phys. E: Sci. Instrum., 16, 1214 (1983).