Critical assessment of the impurity diffusivities in solid and liquid silicon

JOM

Volumn 61, Issue 11, 2009, Pages 49-55

  Tang, Kai ^a   Øvrelid, Eivind J ^a   Tranell, Gabriella ^b   Tangstad, Merete ^b  

^a SINTEF MATERIALS AND CHEMISTRY   (Norway)

^b NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL ASSESSMENT; DENUDED ZONES; DIFFUSION OF IMPURITIES; DIFFUSION PHENOMENA; DIFFUSIVITIES; IMPURITY DIFFUSION; IMPURITY DIFFUSIVITY; INTRINSIC GETTERING; LEAST SQUARES ANALYSIS; LIQUID SILICON; PREEXPONENTIAL FACTOR; SEMI-EMPIRICAL CORRELATION; SILICON FEEDSTOCKS; THERMOCHEMICAL PROPERTIES;

ACTIVATION ANALYSIS; ACTIVATION ENERGY; CHROMIUM; DIFFUSION IN SOLIDS; GALLIUM; LIQUIDS; MANGANESE; MANGANESE COMPOUNDS; SILVER; SIMULATED ANNEALING; TELLURIUM COMPOUNDS; ZINC;

IMPURITIES;

EID: 76349093630     PISSN: 10474838     EISSN: 15431851     Source Type: Journal    
DOI: 10.1007/s11837-009-0167-7     Document Type: Article

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