Novel MEMS stiffness sensor for force and elasticity measurements

Sensors and Actuators, A: Physical

Volumn 158, Issue 1, 2010, Pages 10-17

  Peng, P ^a   Sezen, A S ^a   Rajamani, R ^a   Erdman, A G ^a  

^a University of Minnesota   (United States)

Author keywords

MEMS capacitive sensor; Silicon nitride membranes; Stiffness sensor; Surface micromachining

Indexed keywords

ACTIVE SENSOR; CAPACITIVE SENSOR; CONTACT FORCES; ELASTIC STIFFNESS; ELASTICITY MEASUREMENT; FABRICATED SENSORS; FORCE SENSING; POLYMER SPECIMENS; SENSING MEMBRANES; SENSOR SURFACES; SILICON NITRIDE MEMBRANE; TARGETED OBJECTS; TEST RESULTS; VARYING STIFFNESS;

COMPOSITE MICROMECHANICS; ELASTICITY; FABRICATION; MATHEMATICAL MODELS; MEMS; MICROELECTROMECHANICAL DEVICES; SILICON NITRIDE; STIFFNESS; SURFACE MICROMACHINING;

SENSORS;

EID: 76349090684     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.12.002     Document Type: Article

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