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Journal of Optoelectronics and Advanced Materials

Volumn 11, Issue 9, 2009, Pages 1312-1315

Plasma enhanced chemical vapor deposition of thin ZnO layers at low temperatures

a BULGARIAN ACADEMY OF SCIENCES (Bulgaria)

Author keywords

Optical properties; SEM; Thin layers; XPS; Zinc oxide

Indexed keywords

II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; OPTICAL GLASS; OPTICAL PROPERTIES; OXIDANTS; OXIDE MINERALS; OXYGEN; PLASMA CVD; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SILICON WAFERS; STAINED GLASS; URANIUM METALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC METALLOGRAPHY; ZINC OXIDE;

ACETYLACETONATES; INFRARED REGIONS; LOW TEMPERATURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); RESISTIVELY HEATED; STRUCTURAL AND OPTICAL PROPERTIES; SUBSTRATE TEMPERATURE; THIN LAYERS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 76149141218 PISSN: 14544164 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (10)

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