Quantitative analysis of hydrogen in thin films using Time-of-Flight Elastic Recoil Detection Analysis

Thin Solid Films

Volumn 518, Issue 10, 2010, Pages 2617-2622

  Siketić, Zdravko ^a   Radović, Iva Bogdanović ^a   Jakšić, Milko ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Elastic Recoil Detection Analysis; Hydrogen; Time of Flight

Indexed keywords

AMORPHOUS SI; ATOMIC CONCENTRATION; DEPTH RESOLUTION; DETECTION EFFICIENCY; ELASTIC RECOIL DETECTION ANALYSIS; HYDROGEN ANALYSIS; KEY PROBLEMS; NEAR-SURFACE LAYERS; QUANTITATIVE ANALYSIS; SILICON MATRIX; TIME OF FLIGHT;

AMORPHOUS SILICON; DEPTH PROFILING; ION BEAMS; SPECTROMETERS; SPECTROMETRY; THIN FILMS;

HYDROGEN;

EID: 76049130665     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.07.196     Document Type: Article

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