SCOPUS 정보 검색 플랫폼

Journal of Optoelectronics and Advanced Materials

Volumn 11, Issue 10, 2009, Pages 1392-1395

Modelling of radio-frequency breakdown in argon

(3) Iliev, I a Gocheva Ilieva, S b Sabotinov, N c

a TECHNICAL UNIVERSITY OF SOFIA (Bulgaria)

b UNIVERSITY OF PLOVDIV (Bulgaria)

c BULGARIAN ACADEMY OF SCIENCES (Bulgaria)

Author keywords

Breakdown curve; Low pressure discharge; Modified criteria; Radio frequency discharge

Indexed keywords

ARGON; RADIO WAVES;

BREAKDOWN CURVES; ELECTRODE SEPARATION; LOW PRESSURE DISCHARGE; MODIFIED CRITERIA; RADIO FREQUENCY BREAKDOWN; RADIO FREQUENCY DISCHARGES; RF CAPACITIVE DISCHARGES; TECHNOLOGICAL PROCESS;

ELECTRIC DISCHARGES;

EID: 75949103386 PISSN: 14544164 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (2)

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