Durability improvement of optical H2 gas sensor using Pd thin film on sputter-etched glass substrate

Key Engineering Materials

Volumn 421-422, Issue , 2010, Pages 307-310

  Yakushiji, Yuji ^a   Kuroki, Yuichiro ^a   Okamoto, Tomoichiro ^a   Takata, Masasuke ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Contact angle; Glass substrate; Hydrogen sensor; Optical sensing; Pd thin film; Sputter etching

Indexed keywords

CERAMIC MATERIALS; CHEMICAL SENSORS; CONTACT ANGLE; DURABILITY; ETCHING; GLASS; INTERFACIAL ENERGY; PALLADIUM; THIN FILMS;

GLASS SUBSTRATES; HYDROGEN SENSOR; OPTICAL SENSING; PD THIN FILMS; SPUTTER ETCHING;

SUBSTRATES;

EID: 75749115931     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.421-422.307     Document Type: Conference Paper

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