Study on optically readable hydrogen sensor consisting of Pd/Mg thin films by spectroscopic ellipsometry

Key Engineering Materials

Volumn 216, Issue , 2001, Pages 101-104

  Imai, Y ^a   Mercado, J ^a   Okamoto, T ^a   Takata, M ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Dielectric function; Hydrogen sensor; Optical sensing; Pd Mg thin films; Spectroscopic ellipsometry

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL SENSORS; ELLIPSOMETRY; FILM PREPARATION; HYDROGEN; MAGNETRON SPUTTERING; OPTICAL SENSORS; SPECTROSCOPIC ANALYSIS;

HYDROGEN SENSORS;

THIN FILMS;

EID: 0034772094     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (8)