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Journal of Applied Physics

Volumn 107, Issue 1, 2010, Pages

Refractive error correction for in situ curvature measurement using laser beam deflection method

(2) Xiao, Xinran a Schleh, Daniel a

a Michigan State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING BEAM METHODS; BI-LAYER; CONTAINER WALLS; CURVATURE MEASUREMENT; DEFLECTION ANGLES; ELECTROCHEMICAL APPLICATIONS; IN-SITU; INCIDENT ANGLES; INTERNAL STRESS; LASER BEAM DEFLECTION METHOD; LIGHT BEAM; OPTICAL ARRANGEMENT; OPTICAL PATH; OPTICAL TECHNIQUE; REFRACTIVE ERROR; REFRACTIVE ERROR CORRECTION; STONEY'S EQUATION; THICK SUBSTRATES; TRAVEL DISTANCE;

BENDING MACHINES; LASER BEAMS; SOLID STATE LASERS;

ERROR CORRECTION;

EID: 75649098665 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3276190 Document Type: Article

Times cited : (6)

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