Error analyses on some typically approximate solutions of residual stress within a thin film on a substrate

Journal of Applied Physics

Volumn 98, Issue 5, 2005, Pages

  Zhang, X C ^a,b   Xu, B S ^b   Wang, H D ^b   Wu, Y X ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b NATIONAL KEY LABORATORY FOR REMANUFACTURING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MACROSTRESS; SINGLE-LAYER FILMS; STONEY'S EQUATION;

APPROXIMATION THEORY; ELASTIC MODULI; ERROR ANALYSIS; ESTIMATION; RESIDUAL STRESSES; SUBSTRATES;

THIN FILMS;

EID: 25144477362     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2039277     Document Type: Article

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