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Volumn 98, Issue 5, 2005, Pages
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Error analyses on some typically approximate solutions of residual stress within a thin film on a substrate
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Author keywords
[No Author keywords available]
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Indexed keywords
MACROSTRESS;
SINGLE-LAYER FILMS;
STONEY'S EQUATION;
APPROXIMATION THEORY;
ELASTIC MODULI;
ERROR ANALYSIS;
ESTIMATION;
RESIDUAL STRESSES;
SUBSTRATES;
THIN FILMS;
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EID: 25144477362
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2039277 Document Type: Article |
Times cited : (30)
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References (25)
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