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Volumn 116, Issue 1, 2010, Pages 245-251
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Deposition of silicon oxide hard coatings by low-temperature radio-frequency plasmas
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Author keywords
Coatings; Films; Plasma polymerization; Polycarbonates
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Indexed keywords
ATTENUATED TOTAL REFLECTIONS;
COATING UNIFORMITY;
COMMON PROBLEMS;
FOURIER TRANSFORM INFRARED;
INTERFACIAL ADHESIONS;
LOW TEMPERATURES;
PENCIL HARDNESS TEST;
PLASMA COATING;
PLASMA GAS;
PLASMA POLYMERS;
POLYMERIC SUBSTRATE;
RADIO FREQUENCY PLASMA;
RF-POWER;
SUBSTRATE SIZES;
TRANSMISSION SPECTRUMS;
ULTRA-THIN;
ULTRA-VIOLET;
VISIBLE LIGHT REGION;
CARBONATES;
DEPOSITION;
HARDNESS;
HARDNESS TESTING;
INORGANIC COATINGS;
LIGHT TRANSMISSION;
OXYGEN;
PLASMA DEPOSITION;
PLASMA POLYMERIZATION;
PLASMAS;
POLYCARBONATES;
PROTECTIVE COATINGS;
SILICON COMPOUNDS;
SILICON OXIDES;
SUBSTRATES;
HARD COATINGS;
ADHESION;
COATINGS;
INTERFACIAL PROPERTY;
OXYGEN;
POLYCARBONATE;
RADIO FREQUENCY;
SILICON DIOXIDE;
SUBSTRATE;
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EID: 75449119477
PISSN: 00218995
EISSN: 10974628
Source Type: Journal
DOI: 10.1002/app.31440 Document Type: Article |
Times cited : (19)
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References (13)
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