Effect of heat treatment on TiN films deposited by CFUBMS

Materials Characterization

Volumn 53, Issue 1, 2004, Pages 29-34

  Arslan, E ^a   Efeoglu I ^a  

^a ATATÜRK UNIVERSITY   (Turkey)

Author keywords

CFUBMS; Heat treatment; TiN

Indexed keywords

ARGON; COLOR; COMPOSITION; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; HEAT TREATMENT; MAGNETRON SPUTTERING; MICROSTRUCTURE;

CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING (CFUBMS); ENERGY DISPERSIVE SPECTROMETRY (EDS); SEMICONDUCTOR TECHNOLOGY;

METALLIC FILMS;

EID: 7544251817     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2004.07.011     Document Type: Article

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