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Volumn 34, Issue 1, 2002, Pages 211-214
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Absolute energy calibration in Auger electron spectroscopy by using elastically backscattered primary electrons
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Author keywords
CMA; Convolution; Elastically backscattered primary electrons; Energy calibration; Iteration method
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Indexed keywords
BACKSCATTERING;
COMPUTER SIMULATION;
ELASTICITY;
ELECTRIC SPACE CHARGE;
ELECTRON ENERGY LEVELS;
ELECTRON GUNS;
ITERATIVE METHODS;
THERMAL EFFECTS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ABSOLUTE ENERGY CALIBRATION;
ELASTICALLY BACKSCATTERED PRIMARY ELECTRONS;
AUGER ELECTRON SPECTROSCOPY;
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EID: 0036692752
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1285 Document Type: Conference Paper |
Times cited : (3)
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References (19)
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