Capacity planning with sequential two-level time constraints in the back-end process of wafer fabrication

International Journal of Production Research

Volumn 47, Issue 24, 2009, Pages 6967-6979

  Tu, Ying Mei ^a   Chen, Hsin Nan ^a  

^a CHUNG HUA UNIVERSITY   (Taiwan)

Author keywords

Capacity planning; Operational research; Production control; Production management; Production planning; Semiconductor manufacture

Indexed keywords

CAPACITY PLANNING; OPERATIONAL RESEARCH; PRODUCTION MANAGEMENT; PRODUCTION PLANNING; SEMICONDUCTOR MANUFACTURES;

FABRICATION; PLANNING; PROCESS CONTROL; PRODUCTION CONTROL; PRODUCTION ENGINEERING; PROJECT MANAGEMENT; SEMICONDUCTOR DEVICE MANUFACTURE;

SILICON WAFERS;

EID: 74549179054     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540802415568     Document Type: Article

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