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Volumn 34, Issue 2, 2002, Pages 105-118
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Cycle time estimation for wafer fab with engineering lots
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
COMPUTER SIMULATION;
ESTIMATION;
PROCESS CONTROL;
PRODUCTION CONTROL;
QUEUEING THEORY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON WAFERS;
CYCLE TIME ESTIMATION;
ENGINEERING LOTS;
MATERIAL FLOW CONTROL;
INDUSTRIAL ENGINEERING;
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EID: 0036468403
PISSN: 0740817X
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1011935728647 Document Type: Article |
Times cited : (39)
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References (23)
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