Ion implantation induced disorder in single-crystal and sputter-deposited polycrystalline CdTe characterized by ellipsometry and backscattering spectrometry

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1358-1361

  Petrik, P ^a   Khanh N Q ^a   Li, Jian ^b   Chen, Jie ^b   Collins, R W ^b   Fried, M ^a   Radnoczi G Z ^a   Lohner, T ^a   Gyulai, J ^c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF TOLEDO   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING SPECTROMETRY; CDTE; CRITICAL POINTS; DECHANNELING; DISLOCATION LOOP; EXTENDED DEFECT; FLUENCES; GENERAL PURPOSE; GRAIN SIZE; ION IMPLANTED; LOW LEVEL; POLYCRYSTALLINE; RUTHERFORD BACKSCATTERING/CHANNELING; SECOND-DERIVATIVE ANALYSIS; SIMULTANEOUS IMPLANTATION; SINGLE-CRYSTAL SI; SINGLE-CRYSTALLINE; SRIM SIMULATION; STOPPING AND RANGE OF IONS IN MATTERS; SURFACE SMOOTHNESS;

AMORPHOUS MATERIALS; CADMIUM ALLOYS; CADMIUM COMPOUNDS; DEFECT DENSITY; DEFECTS; DISLOCATIONS (CRYSTALS); EQUATIONS OF STATE; GRAIN SIZE AND SHAPE; ION IMPLANTATION; MAGNETRONS; METHANOL; MOLECULAR BEAM EPITAXY; OPTICAL PROPERTIES; SILICON; SPECTROMETRY; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; XENON;

OPTICAL FILMS;

EID: 74549167687     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777866     Document Type: Conference Paper

References (13)

1. Joohyun Koh, Yeeheng Lee, H. Fujiwara, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 73, 1526 (1998).
2. Jian Li, Jie Chen, N. J. Podraza, and R. W. Collins, Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, May 2006, Waikoloa, Hawaii, USA, IEEE Proceedings, Vol. 1 (2006), p. 392, ISBN 1-4244-0017-1.
3. A. Gupta and A. D. Compaan, Appl. Phys. Lett. 85, 684 (2004).
4. Hien V. Nguyen and R. W. Collins, Phys. Rev. B 47, 1911 (1993).
5. K. Tsunoda, S. Adachi, and M. Takahashi, J. Appl. Phys. 91, 2936 (2002).
6. Joungchel Lee, P. I. Rovira, Ilsin An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
7. R. W. Collins, A. S. Ferlauto, G. M. Ferreira, C. Chen, J. Koh, R. J. Koval, Y. Lee, J. M. Pearce, and C. R. Wronski, Solar Energy Mater. Solar Cells 78, 143 (2003).
8. R. W. Collins, Ilsin An, Joungchel Lee, and J. A. Zapien, in: Handbook of Ellipsometry (William Andrew, Norwich, NY, 2005), p. 481.
9. The Stopping and Range of Ions in Matter, http://www.srim.org.
10. E. Kótai, Nucl. Instrum. Methods B 85, 588 (1994).
11. G. Bahir and R. Kalish, J. Appl. Phys. 54, 3129 (1983).
12. D. E. Aspnes, S. M. Kelso, C. G. Olson, and D. W. Lynch, Phys. Rev. Lett. 82, 1863 (1982).
13. P. Petrik, N. Q. Khánh, Jian Li, Jie Chen, R. W. Collins, M. Fried, G. Radnóczi, T. Lohner, and J. Gyulai, to be published.