SCOPUS 정보 검색 플랫폼

Volumn 87, Issue 3, 2010, Pages 383-386

Grain morphology of Cu damascene lines

Author keywords

Cu; Grain growth; Interconnects; Morphology

Indexed keywords

CU; CU DAMASCENE; DAMASCENE CU INTERCONNECTS; DAMASCENE LINES; GRAIN MORPHOLOGIES; GRAIN STRUCTURES; HIGHLY INTEGRATED; MORPHOLOGY EVOLUTION;

ANNEALING; CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; MORPHOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

GRAIN GROWTH;

EID: 74449089560 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2009.05.033 Document Type: Article

Times cited : (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.