Synthesis of silicon nanotubes with cobalt silicide ends using anodized aluminum oxide template

Nanotechnology

Volumn 21, Issue 5, 2010, Pages

  Zhang, Zhang ^a   Liu, Lifeng ^a   Shimizu, Tomohiro ^a   Senz, Stephan ^a   Gösele, Ulrich ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC ALUMINUM OXIDE; ANODIZED ALUMINUM OXIDE; CO NANOPARTICLES; COBALT SILICIDE; CONTROLLABLE STRUCTURES; GROWTH DIRECTIONS; PORE WALL; SEMICONDUCTOR TECHNOLOGY; SI-BASED; SILICON NANOTUBES; SMALL-DIAMETER;

ALUMINA; ALUMINUM; COBALT; NANOTUBES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH; SILICIDES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 73949154924     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/5/055603     Document Type: Article

References (25)

1. Goldberger J, Fan R and Yang P 2006 Acc. Chem. Res. 39 239-48
2. Allen B L, Kichambare P D and Star A 2007 Adv. Mater. 19 1439-51
3. Mu C, Yu Y, Liao W, Zhao X and Xu D 2005 Appl. Phys. Lett. 87 113104
4. Lan J, Cheng D, Cao D and Wang W 2008 J. Phys. Chem. C 112 5598-604
5. Sha J, Niu J, Ma X, Xu J, Zhang X, Yang Q and Yang D 2002 Adv. Mater. 14 1219-21
6. Jeong S Y, Kim J Y, Yang H D, Yoon B N, Choi S-H, Kang H K, Yang C W and Lee Y H 2003 Adv. Mater. 15 1172-6
7. Tang Y H, Pei L Z, Chen Y W and Guo C 2005 Phys. Rev. Lett. 95 116102(4)
8. Zhang S-L and stling M 2003 Crit. Rev. Solid State Mater. Sci. 28 1-129
9. Kamal A H M, Obeidat A T and Budri T 2002 J. Vac. Sci. Technol. B 20 173-9
10. Eichfeld S M, Ho T T, Eichfeld C M, Cranmer A, Mohney S E, Mayer T S and Redwing J M 2007 Nanotechnology 18 315201
11. Goodey A P, Eichfeld S M, Lew K K, Redwing J M and Mallouk T E 2007 J. Am. Chem. Soc. 129 12344-5
12. Liu L, Lee W, Huang Z, Scholz R and Gösele U 2008 Nanotechnology 19 335604
13. Zhang Z, Lai C, Xu N, Ren S, Ma B, Zhang Z and Jin Q 2007 Nanotechnology 18 095603
14. Thompson G E and Wood G C 1981 Nature 290 230-2
15. Lee W, Scholz R, Nielsch K and Gösele U 2005 Angew. Chem. Int. Edn 44 6050-4
16. Wagner R S and Ellis W C 1964 Appl. Phys. Lett. 4 89-90
17. Wang Y, Schmidt V, Senz S and Gösele U 2006 Nat. Nanotechnol. 1 186-9
18. Kamins T I, Williams R S, Chen Y, Chang Y-L and Chang Y A 2000 Appl. Phys. Lett. 76 562-4
19. Hofmann S, Sharma R, Wirth C T, Sodi F C, Ducati C, Kasama T, Borkowski R E D, Drucker J, Bennett P and Robertson J 2008 Nat. Mater. 7 372-7
20. Qu Y, Carter J D and Guo T 2006 J. Phys. Chem. B 110 8296-301
21. Massalski T B 1998 Binary Alloy Phase Diagrams vol 2 2nd edn (Materials Park, OH: ASM International)
22. Appelbaum A, Knoell R V and Murarka S P 1985 J. Appl. Phys. 57 1880-6
23. Comrie C M and Newman R T 1996 J. Appl. Phys. 79 153-6
24. Walter D and Karyasa I W 2005 Z. Anorg. Allg. Chem. 631 1285-8
25. Lau S S, Mayer J W and Tu K N 1978 J. Appl. Phys. 49 4005-10