Resistivity measurements of intentionally and unintentionally template-grown doped silicon nanowire arrays

Nanotechnology

Volumn 18, Issue 31, 2007, Pages

  Eichfeld, Sarah M ^a   Ho, Tsung Ta ^b   Eichfeld, Chad M ^a   Cranmer, Alexana ^a   Mohney, Suzanne E ^a   Mayer, Theresa S ^a,b   Redwing, Joan M ^a,b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY RESISTANCE; INLET GAS RATIOS; NANOWIRE GROWTH; NANOWIRE LENGTH;

ALUMINA; ELECTRIC CONTACTS; SILICON; SUBSTRATES;

NANOWIRES;

ALUMINUM OXIDE; BORON DERIVATIVE; GOLD; NANOWIRE; PHOSPHINE; SILANE; SILICON; TRIMETHYLBORON; UNCLASSIFIED DRUG;

ARTICLE; CATALYSIS; LIQUID; MEASUREMENT; METHODOLOGY; PRIORITY JOURNAL; SOLID; VAPOR;

EID: 34547115696     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/31/315201     Document Type: Article

References (18)

1. Goldberger J, Hochbaum A I, Fan R and Yang P D 2006 Nano Lett. 6 973-7
2. Kayes B M, Atwater H A and Lewis N S 2005 J. Appl. Phys. 97 114302
3. Zheng G F, Patolsky F, Cui Y, Wang W U and Lieber C M 2005 Nat. Biotechnol. 23 1294-301
4. Patolsky F, Zheng G F and Lieber C M 2006 Anal. Chem. 78 4260-9
5. Huang Y, Duan X, Wei Q and Lieber C M 2001 Science 291 630-3
6. Smith P A, Nordquist C D, Jackson T N, Mayer T S, Martin B R, Mbindyo J and Mallouk T E 2000 Appl. Phys. Lett. 77 1399-401
7. Almawlawi D, Liu C Z and Moskovits M 1994 J. Mater. Res. 9 1014-8
8. Martin C R 1994 Science 266 1961-6
9. Zhang Z B, Gekhtman D, Dresselhaus M S and Ying J Y 1999 Chem. Mater. 11 1659-65
10. Tian M L, Wang J G, Kurtz J S, Liu Y, Chan M H W, Mayer T S and Mallouk T E 2005 Phys. Rev. B 71 104521
11. Liu C H, Yiu W C, Au F C K, Ding J X, Lee C S and Lee S T 2003 Appl. Phys. Lett. 83 3168-70
12. Bogart T E, Dey S, Lew K K, Mohney S E and Redwing J M 2005 Adv. Mater. 17 114-7
13. Lew K K and Redwing J M 2003 J. Cryst. Growth 254 14-22
14. Dilts S M, Mohammad A, Lew K K, Redwing J M and Mohney S E 2005 Mater. Res. Soc. Symp. Proc. 832 F9.10
15. Lew K K, Pan L, Bogart T E, Dilts S M, Dickey E C, Redwing J M, Wang Y, Cabassi M, Mayer T S and Novak S W 2004 Appl. Phys. Lett. 85 3101-3
16. Wang Y F, Lew K K, Ho T T, Pan L, Novak S W, Dickey E C, Redwing J M and Mayer T S 2005 Nano Lett. 5 2139-43
17. Mohammad A M, Dey S, Lew K K, Redwing J M and Mohney S E 2003 J. Electrochem. Soc. 150 G577-80
18. Lee H H 1990 Fundamentals of Microelectronics Processing (New York: McGraw-Hill)