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Materials Transactions

Volumn 50, Issue 11, 2009, Pages 2680-2684

Nanoparticle deposition of Al2O3 powders on various substrates

(5) Song, Woojin a Jung, Kyubong a Chun, Doo Man b Ahn, Sung Hoon a Lee, Caroline Sunyong a

a Hanyang University (South Korea)

b Seoul National University (South Korea)

Author keywords

Al2O3; Micro nozzle; Nano particle deposition system; Silicon substrate; Thickness

Indexed keywords

AL SUBSTRATE; CERAMIC LAYER; DEPOSITIONAL CONDITION; DIFFERENT SUBSTRATES; KEY PARAMETERS; LOW MELTING POINT; MELTING TEMPERATURES; MICRONOZZLE; NANOPARTICLE DEPOSITION; POWDER LAYER; POWDER PARTICLES; SEMICONDUCTOR PROCESSING TECHNIQUES; SI SUBSTRATES; SILICON SUBSTRATES; STOKES NUMBER; SUBSTRATE HARDNESS; SUBSTRATE TYPES; VARIOUS SUBSTRATES;

ALUMINUM; DEPOSITION; HARDNESS; MELTING POINT; METAL MELTING; NANOPARTICLES; NOZZLES; SINTERING;

SUBSTRATES;

EID: 73349083042 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.M2009272 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.