A three-step high-Q variable MEMS capacitor with low actuation voltage

European Microwave Week 2009, EuMW 2009: Science, Progress and Quality at Radiofrequencies, Conference Proceedings - 39th European Microwave Conference, EuMC 2009

Volumn , Issue , 2009, Pages 1136-1139

  Zahirovic, Nino ^a   Mansour, Raafat R ^a   Yu, Ming ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b COM DEV Ltd ^*  (Canada)

Author keywords

MEMS varactors; RF MEMS capacitors; Tunable capacitors

Indexed keywords

CAPACITANCE RATIO; DE-EMBEDDING; HIGH QUALITY FACTORS; LOW ACTUATION VOLTAGE; MEMS CAPACITORS; MEMS VARACTOR; RF-MEMS; SELF-RESONANCE FREQUENCY; SHUNT CONFIGURATION; TUNABLE CAPACITORS; TUNING RANGES;

CAPACITANCE; CAPACITORS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; RESONANCE; VARACTORS;

MEMS;

EID: 72949083983     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2009.5296143     Document Type: Conference Paper

References (8)

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