A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-order ΔΣ loop

ESSCIRC 2009 - Proceedings of the 35th European Solid-State Circuits Conference

Volumn , Issue , 2009, Pages 288-291

  Pastre, Marc ^a   Kayal, Maher ^a   Schmid, Hanspeter ^b   Huber, Alexander ^b   Zwahlen, Pascal ^c   Nguyen, Anne Marie ^c   Dong, Yufeng ^c  

^a EPFL   (Switzerland)

^b UNIVERSITY OF APPLIED SCIENCES AND ARTS NORTHWESTERN SWITZERLAND   (Switzerland)

^c Colibrys SA ^*  (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; CDS; DIGITAL PARTS; FLASH-ADC; FRONT END; LOOP STABILITY; LOW NOISE; MEMS SENSORS; MIXED SIGNAL; NOISE PERFORMANCE; SENSOR PARAMETER; VOLTAGE MODE;

ACCELEROMETERS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; DIGITAL FILTERS;

SENSORS;

EID: 72849131449     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSCIRC.2009.5326033     Document Type: Conference Paper

References (4)

1. th-order Digital Compensator", ISSCC Dig. Tech. Papers, pp. 248-249, Feb. 2005
2. B. V. Amini, R. Abdolvand, F. Ayazi, "A 4.5mW Closed-Loop ΔΣ Micro-Gravity CMOS-SOI Accelerometer", ISSCC Dig. Tech. Papers, pp. 1001-1002, Feb. 2006
3. J. Wu, G. K. Fedder, L. R. Carley, "A Low-Noise Low-Offset Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS Accelerometers", ISSCC Dig. Tech. Papers, pp. 428-429, 478, Feb. 2002
4. J. Wu, G K. Fedder, L. R. Carley, "A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-μg/√Hz Monolithic CMOS MEMS Accelerometer", IEEE J. Solid-State Circuits, Vol. 39, pp. 722-730, May 2004