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Volumn 22, Issue 6, 2009, Pages 468-480
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Determination of reduced Young's modulus of thin films using indentation test
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Author keywords
Film substrate system; Indentation test; Punch size effect; Reduced Young's modulus; Weight function
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Indexed keywords
CYLINDRICAL INDENTATION;
DIFFERENT SIZES;
EXTRAPOLATION PROCEDURE;
FE MODEL;
INDENTATION BEHAVIOR;
INDENTATION DEPTH;
INDENTATION TEST;
MICRO-ROUGHNESS;
NUMERICAL APPROACHES;
PUNCH RADIUS;
SIZE EFFECTS;
WEIGHT FUNCTIONS;
YOUNG'S MODULUS;
APPROXIMATION THEORY;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
FUNCTION EVALUATION;
MECHANICAL PROPERTIES;
TESTING;
THIN FILMS;
ELASTICITY;
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EID: 72649084066
PISSN: 10067191
EISSN: None
Source Type: Journal
DOI: 10.1016/S1006-7191(08)60125-8 Document Type: Article |
Times cited : (4)
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References (21)
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