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Volumn 42, Issue 24, 2009, Pages

Molecular dynamics simulations of oxygen-containing polymer sputtering and the Ohnishi parameter

Author keywords

[No Author keywords available]

Indexed keywords

ETCH MASK; MD SIMULATION; MEASURED DATA; MOLECULAR DYNAMICS SIMULATIONS; PARAMETRIZATIONS; PLASMA-BASED PATTERN TRANSFER; POLYMER COMPOSITION; POLYMER SURFACES; POLYMER TRANSITION; QUANTITATIVE MODELS; SPUTTERING YIELDS; STEADY STATE;

EID: 72449211092     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/24/242001     Document Type: Article
Times cited : (15)

References (10)
  • 5
    • 72449126154 scopus 로고    scopus 로고
    • Nest D 2009 PhD Thesis University of California, Berkeley
    • (2009) PhD Thesis
    • Nest, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.