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Volumn 42, Issue 24, 2009, Pages
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Molecular dynamics simulations of oxygen-containing polymer sputtering and the Ohnishi parameter
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCH MASK;
MD SIMULATION;
MEASURED DATA;
MOLECULAR DYNAMICS SIMULATIONS;
PARAMETRIZATIONS;
PLASMA-BASED PATTERN TRANSFER;
POLYMER COMPOSITION;
POLYMER SURFACES;
POLYMER TRANSITION;
QUANTITATIVE MODELS;
SPUTTERING YIELDS;
STEADY STATE;
ION BOMBARDMENT;
IONS;
MOLECULAR DYNAMICS;
MOLECULAR OXYGEN;
PHOTORESISTS;
SIMULATORS;
SPUTTERING;
POLYMERS;
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EID: 72449211092
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/24/242001 Document Type: Article |
Times cited : (15)
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References (10)
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