AFM local oxidation nanopatterning of a high mobility shallow 2D hole gas

Superlattices and Microstructures

Volumn 32, Issue 2-3, 2002, Pages 99-102

  Rokhinson, L P ^a,c   Tsui, D C ^a   Pfeiffer, L N ^b   West, K W ^b  

^a Princeton University   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c PURDUE UNIVERSITY   (United States)

Author keywords

AFM lithography; GaAs AlGaAs shallow hole gas; Quantum point contact

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; CARRIER MOBILITY; ELECTRON BEAM LITHOGRAPHY; OXIDATION; QUANTUM OPTICS; SEMICONDUCTOR QUANTUM WELLS; SUBSTRATES; SURFACE PROPERTIES;

AFM LITHOGRAPHY; GAAS\ALGAAS SHALLOW HOLE GAS; QUANTUM POINT CONTACTS; SURFACE POTENTIAL;

NANOTECHNOLOGY;

EID: 7244236462     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/S0749-6036(02)00120-9     Document Type: Article

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