Modelling and characterization of thin film planar capacitors: Inherent errors and limits of applicability of partial capacitance methods

Measurement Science and Technology

Volumn 20, Issue 11, 2009, Pages

  Vukadinovic, M ^a   Malic, B ^a   Kosec, M ^a   Krizaj, D ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Modelling; Partial capacitance; Permittivity measurement; Planar capacitor; Simulation; Thin films

Indexed keywords

CAPACITANCE; CONFORMAL MAPPING; COPLANAR WAVEGUIDES; ELECTRODES; FERROELECTRIC FILMS; MODELS; PERMITTIVITY MEASUREMENT; THIN FILM CIRCUITS; THIN FILMS; WAVEGUIDES;

ANALYTICAL EQUATIONS; CONFORMAL MAPPING METHOD; COPLANAR WAVE-GUIDE (CPW); MEASUREMENT TECHNIQUES; PARTIAL CAPACITANCE; PARTIAL CAPACITANCE METHOD; PLANAR CAPACITORS; SIMULATION;

FILM CAPACITOR;

EID: 72149089019     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/11/115106     Document Type: Article

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