Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides

Journal of Lightwave Technology

Volumn 27, Issue 18, 2009, Pages 3999-4008

  Yap, Kuan Pei ^a   Delâge, André ^a   Lapointe, Jean ^a   Lamontagne, Boris ^a   Schmid, Jens H ^a   Waldron, Philip ^a   Janz, Siegfried ^a   Syrett, Barry A ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

Scattering loss; sidewall roughness; silicon on in sulator (SOI) waveguide; star coupler

Indexed keywords

EID: 72049128683     PISSN: 07338724     EISSN: 15582213     Source Type: Journal    
DOI: 10.1109/JLT.2009.2021562     Document Type: Article

References (17)

1. S. Janz, “Silicon-based waveguide technology for wavelength division multiplexing,” in Silicon Photonics, L. Pavesi and D. J. Lockwood, Eds., Berlin, Germany, 2004, pp. 343–355, Springer-Verlag.
2. B. Lamontagne, “Enabling fabrication technologies for planar waveguide devices,” in Optical Waveguides: From Theory to Applied Technologies, M. L. Calvo and V. Lakshminarayanan, Eds. Boca Raton, FL: CRC Press, 2007, pp. 271–308.
3. J. P. R. Lacey and F. P. Payne, “Radiation loss from planar waveguide with random wall imperfections,” IEEE J. Optoelectron., vol. 137, no. 4, pp. 282–288, 1990.
4. 2 waveguide: Experiments and model,” Appl. Phys. Lett., vol. 77, no. 11, pp. 1617–1619, Sep. 2000.
5. F. Ladouceur and J. D. Love, Silica-Based Buried Channel Waveguides and Devices. London, U.K.: Chapman and Hall, 1996, ch. 8.
6. J. H. Schmid, A. Delage, B. Lamontagne, J. Lapointe, S. Janz, P. Cheben, A. Densmore, P. Waldron, D.-X. Xu, and K. P. Yap, “Interference effect in scattering loss of high-index-contrast planar waveguides caused by boundary reflections,” Opt. Lett., vol. 33, no. 13, pp. 1479–1481,2008.
7. F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quant. Electron., vol. 26, pp. 977–986, 1994.
8. T. Barwicz and H. A. Haus, “Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides,” IEEE J. Lightw. Tech., vol. 23, no. 9, pp. 2719–2732, Sep. 2005.
9. G. T. Reed and A. P. Knights, Silicon Photonics. London, U.K.: Wiley, 2004, ch. 4.
10. S. Chen, Q. Yan, Q. Xu, Z. Fan, and J. Liu, “Optical waveguide propagation loss measurement using multiple reflections method,” Opt. Comm., vol. 256, no. 1–3, pp. 68–72, 2005.
11. T. Ikegami, “Reflectivity of mode at facet and oscillation mode in double-heterostructure injection lasers,” IEEE J. Quant. Electron., vol. QE-8, no. 6, pp. 470–476, 1972.
12. G. Tittelbach, B. Richter, and W. Karthe, “Comparison of three transmission methods for integrated optical waveguide propagation loss measurement,” Pure Appl. Opt., vol. 2, no. 6, pp. 683–706, 1993.
13. B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yosuimoto, I. Rendina, and F. Coppinger, “Advances in silicon-on-insulator optoelectronics,” IEEE J. Sel. Top. Quant. Electron., vol. 4, no. 6, pp. 938–947, 1998.
14. 2 waveguides by roughness reduction,” Opt. Lett., vol. 26, no. 23, pp. 1888–1890, 2001.
15. H. Kogelnik, “Theory of optical waveguides,” in Guided Wave Optoelectronics, T. Tamir, Ed., 2nd ed. Berlin, Germany: Springer-Verlag, 1990, pp. 7–87.
16. FIMMWAVE. Oxford, U.K.: Photon Design [Online]. Available: www.photond.com
17. D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low loss amorphous silicon channel waveguides for integrated photonics,” in Proc. IEEE 3rd Int. Conf. on Group IV Photon, Sep. 2006, pp. 1–3.